​​Customized SiC Boats Vertical & Horizontal Wafer Carriers​​

​​Customized SiC Boats Vertical & Horizontal Wafer Carriers​​

A Silicon Carbide (SiC) Boat is a high-end load-bearing component manufactured from ​​high-purity silicon carbide (SiC) ceramic material​​, specifically designed for ​​high-temperature, corrosive process environments​​ in the semiconductor and photovoltaic industries. It is primarily categorized into ​​vertical boats​​ and ​​horizontal boats​​:

• ​​Vertical Boats​​: Typically used in ​​vertical diffusion furnaces​​ for processes such as ​​oxidation and diffusion​​, where they ​​vertically carry wafers​​, optimizing space utilization and supporting batch processing.
• ​​Horizontal Boats​​: Suitable for ​​horizontal diffusion furnaces​​, operating in atmospheres containing ​​oxygen (reaction gas), nitrogen (protective gas), and small amounts of hydrogen chloride​​. They ​​horizontally carry wafers​​ at temperatures around ​​1250°C​​, enabling stable thermal processing.

SiC Boat​s Key Characteristic Parameters

SiC Boat​s Application Areas

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• Semiconductor Manufacturing​​: Used in processes like ​​diffusion, chemical vapor deposition (CVD), annealing, and ion implantation​​ to carry silicon wafers through high-temperature treatments, ensuring process purity and uniformity. They are indispensable core consumables in integrated circuit manufacturing.
• ​​Photovoltaic Industry​​: Widely used in production lines for high-efficiency solar cells like ​​TOPCon, HJT, and PERC​​. They support silicon wafers in LPCVD equipment for processes such as ​​passivation layer preparation, diffusion, and annealing​​, enhancing cell conversion efficiency and yield.
• ​​LED and Third-Generation Semiconductors​​: Used in processes like ​​GaN epitaxial growth (MOCVD)​​ to carry sapphire substrates, resisting corrosive gases like NH₃. Also used in ​​SiC crystal growth​​ as seed crystal holders.
• ​​New Energy and Research​​: Applied in ​​high-temperature sintering of lithium battery cathode materials​​ and ​​radioactive material processing in the nuclear industry​​, requiring resistance to radiation, corrosion, and high temperatures.

SiC Boat​s Features

Product Features of Silicon Carbide Vertical Boats:​​

1. ​​3D printing integrated forming​​.
2. ​​Base material impurity content <300 PPM​​.
3. ​CVD silicon carbide coating base material impurity content <5 PPM​​.
4. ​​High thermal conductivity​​.
5. ​​High thermal shock stability​​.
6. ​​Can be customized​​ according to customer designs to create different tooth types and tooth lengths.

​​Product Features of Silicon Carbide Horizontal Boats:​​

1. ​​3D printing integrated forming​​.
2. ​​Base material impurity content <300 PPM​​.
3. ​​CVD silicon carbide coating base material impurity content <5 PPM​​.
4. ​​High thermal shock stability​​.
5. ​​Precision tooth machining​​.

Q1: Why choose a silicon carbide (SiC) boat over a quartz boat for semiconductor processing?​​

​​A1:​​ SiC boats offer ​​superior high-temperature stability (withstanding up to 1600-1650°C), significantly longer service life (years vs. months for quartz), and extreme resistance to thermal shock and corrosion​​, reducing particle generation and contamination risks in processes like diffusion and CVD.

​​Q2: What are the primary applications of silicon carbide (SiC) vertical and horizontal boats?​​

​​A2:​​ They are primarily used in ​​semiconductor wafer fabrication (e.g., diffusion, oxidation, CVD, annealing) and high-efficiency solar cell production (e.g., TOPCon, HJT)​​ to carry and heat-treat wafers under extreme conditions, ensuring process purity and yield.

Tags: #SiC Boats, #SiC Crystal Boats, #High-Purity, #Customized, #SiC Ceramics​​, #​Vertical & Horizontal, #Wafer Carriers​​