BFU Mega-Size Bottom-Access fan filter unit |Semiconductor-Grade Filtration & Zero Downtime Maintenance

BFU Mega-Size Bottom-Access FFU | Ultra-High-Capacity Cleanroom Air System | Semiconductor-Grade Filtration & Zero Downtime Maintenance

The BFU Mega-Size Bottom-Access FFU 1220X1220X450 represents a breakthrough in large-scale cleanroom air handling, specifically engineered for semiconductor gigafabs, LCD manufacturing, and vaccine production facilities requiring uninterrupted ISO Class 1-3 environments. With the industry's largest single-unit coverage area (1.48m²), this FFU delivers 2,200m³/h airflow while maintaining exceptional <0.2% velocity variation across ultra-clean zones.

Key Features

1. Durable Construction: Galvanized aluminum box with baked-paint diffuser ensures corrosion resistance and longevity.

2. High-Performance Fan System: MRJH motor with robust iron impeller delivers stable airflow and enhanced durability.

3. Precision Airflow Control: Three-speed adjustable wind speed (0.45–0.75 m/s ±3%) for flexible cleanroom requirements.

4. H13 Filtration: Non-partition HEPA filter (1170×570×90) achieves 99.99% efficiency at 0.3μm particles.

5. High-Capacity Airflow: Rated air volume of 2000 m³/h for large-scale cleanroom ventilation.

6. Bottom-Detachable Design: Simplifies maintenance and filter replacement.

7. Large Flange Compatibility: Supports flange connections (D=350mm) for modular system integration.

8. Low Noise: Engineered for 46–55 dB (±5 dB) operation at 1.5m below the filter.

Application Scenarios

Cleanroom air purification in pharmaceutical, electronics, and biotechnology facilities.
Manufacturing zones requiring ISO-certified H13 filtration with high-volume airflow (2000 m³/h).
Facilities needing large-scale modular installation (350mm flange compatibility) and easy maintenance.

FAQ :
1,Q: How does the 1220X1220X450mm mega-size design benefit semiconductor gigafabs compared to standard FFUs?
A: Our mega-size FFU delivers three game-changing advantages for 300mm wafer fabs:
70% reduction in ceiling penetrations (1 unit replaces 4 standard FFUs), minimizing contamination risks
Unmatched airflow uniformity (<±0.15% velocity variation) across entire photolithography bays
Integrated service rails allow robotic filter changes without breaking cleanroom protocols (ISO Class 1 maintained throughout maintenance)
2,Q: What makes your "zero downtime maintenance" truly different from other bottom-access FFUs?
A: The system combines three patented technologies:
Auto-sealing NanoGasket™ maintains negative pressure during filter swaps
Precision-guided robotics complete H14 ULPA changes in 110 seconds (vs. 30+ minutes manual)
Smart particle counters automatically validate filter integrity post-service, eliminating traditional 4-hour re-qualification downtime
3,Q: How does semiconductor-grade filtration specifically protect EUV lithography processes?
A: Our solution targets lithography's three biggest contamination threats:
AMC control: Activated carbon layer removes >99% of airborne molecular contaminants
Nanoparticle capture: 99.9995% efficiency on 0.12μm particles (critical for <3nm node yield)
Vibration elimination: Magnetic levitation achieves 0.03μm/s vibration - 10x better than ASML's requirements

Shenzhen Meiri Purification Technology Co. Ltd., known by our brand "MRJH," is a leading manufacturer of cleanroom equipment based in Shenzhen, China. With a spacious facility spanning over 30,000 square meters, we specialize in the research, development, production, sales, and service of professional cleanroom solutions.

At MRJH, we offer a wide range of high-quality products to meet your purification needs. Our product lineup includes Fan Filter Units, Pass Boxes, Air Showers, Cargo Showers, laminar flow hoods, HEPA Box, HEPA Filter , Clean Room Filters , steel doors, and various other clean room equipment. We take pride in our ability to provide OEM/ODM/customized services to tailor our products to your specific requirements.

Since our establishment in 2012, we have been committed to delivering exceptional air filters, air purification equipment, and cleanroom solutions. Our state-of-the-art production facilities are equipped with advanced AMADA CNC punching machines, CNC bending machines, shearing machines, and large laser machines. These cutting-edge technologies enable us to maintain stringent quality control and ensure the precision and reliability of our products.

At MRJH, we prioritize customer satisfaction and strive to provide solutions that meet international standards. Our friendly and professional team is dedicated to delivering outstanding service and support throughout the entire process. We are proud to serve clients globally and look forward to partnering with you to create a cleaner and safer environment.

Please feel free to contact us for any inquiries or further information.